| 摘要 |
PROBLEM TO BE SOLVED: To provide a positioning device that can drive a slider at high speed, is accurate, saves space, and has a long life. SOLUTION: This positioning device has first and second positioning devices 10 and 20. The first positioning device 10 positions a first slider 12 in an X-axis direction to a base 11 by a first driving device 14. The second positioning device 20 positions a second slider 13 in a Y-axis direction to a base 11 by a second driving device 34. In the positioning device, the first and second driving devices 14 and 34 are provided in the base 11, the first and second sliders 12 and 13 are arranged in a Z-axis direction while they are overlapped, and a stage 30 is engaged to the first and second sliders 12 and 13.
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