APPARATUS FOR INSPECTING SUBSTRATE WITH RING ILLUMINATION UNIT

摘要

A substrate inspecting apparatus including a ring illumination unit is provided to distinguish probe marks from an image of a portion to be inspected by using plural light emitting devices mounted on a ring-shaped inner surface. A stage(210) supports a substrate(20) having a region to be inspected. An image acquiring unit(220) acquires an image of the region to be inspected. A ring illumination unit(230) is interposed between the stage and the image acquiring unit to illuminate the region to be inspected. The ring illumination unit has a printed circuit board(232) and plural light devices(234) mounted on the printed circuit board. An inner surface of the printed circuit board is inclined to an upper surface of the stage.