MULTI-HOLLOWS CATHODE ADDED MAGNETICS AND SHOWERHEAD OF A GAS SEPARATION TYPE USING THE SAME

摘要

A hollow electrode with magnetic and a gas separative showerhead using the same are provided to increase an ionization rate of reaction gas by simultaneously inducing a magnetic field and an electric field on the hollow electrode. A hollow electrode(10) mounted in a lower portion of a showerhead is made of conductor, and is provided with plural holes(15) arranged at regular intervals therein. Plural magnets(20) are inserted into spaces which are formed around the holes. An insulating layer(30) is formed along an interface between the hollow electrode and the magnet. A shielding layer(40) is formed to cover partially or wholly a surface of the magnet inserted into the hole.