发明名称 COMPOSITION, ARTICLE, ITS MANUFACTURE AND USE
摘要 <p>A composition comprising a polymer which contains hydroxyl groups, the composition being suitable as a coating for an IR-imagable lithographic precursor, the composition comprising one or more agent(s) which: a) absorbs IR radiation of wavelength greater than 800 nm and consequently generates heat; b) functions as an insolubiliser which inhibits dissolution of non-imaged regions of the coating in a developer but permits dissolution of imaged regions during development; and c) improves the inhibition to dissolution of the non-imaged regions and/or the dissolution of the imaged regions so as to improve the dissolution contrast ratio (DCR) of the non-imaged/imaged regions; wherein the agent which performs function c) comprises a moiety which has hydrophobic and ionic character. Such a composition can show excellent selectivity as regards dissolution rates in developer, as between the imaged and non-imaged areas, whilst the energy needed to achieve this differentiation (or“operating speed”) is not comprised.</p>
申请公布号 EP2035231(A2) 申请公布日期 2009.03.18
申请号 EP20070766151 申请日期 2007.07.02
申请人 IMAGICHEM LIMITED 发明人 BENNETT, PETER ANDREW REATH;ALLEGRINI, ROBERTO MASSIMO
分类号 B41C1/10 主分类号 B41C1/10
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