Rotation rate sensor and method for calibrating a rotation rate sensor

摘要

A rotational rate sensor is provided having a substrate and a Coriolis element, the rotational rate sensor having a drive means for exciting the Coriolis element to a Coriolis oscillation, and the rotational rate sensor having a detection device for producing a sensor signal as a function of a deflection of the Coriolis element relative to the substrate on the basis of a Coriolis force acting on the Coriolis element, and in addition the rotational rate sensor being configured to carry out a self-calibration when a rotational acceleration signal produced as a function of the sensor signal falls below a specified threshold value.

主权项

1. A rotational rate sensor, comprising:
a substrate; a Coriolis element; a driver to excite the Coriolis element to a Coriolis oscillation; a detection device to produce a sensor signal as a function of a deflection of the Coriolis element relative to the substrate based on a Coriolis force acting on the Coriolis element; wherein the rotational rate sensor is configured to carry out a self-calibration when a rotational acceleration signal produced as a function of the sensor signal falls below a threshold value; and a difference value formation unit configured to produce the rotational acceleration signal from a difference between at least two sensor values of the sensor signal.