发明名称 GRINDING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a grinding device which can uniformalize a thickness of a rectangular work-piece.SOLUTION: A grinding device 1 holds a rectangular work-piece W by a conical holding surface 23 of a chuck table 21, and rotates the chuck table by chuck table rotation means 22. A rotational angle of the chuck table is recognized by a chuck table rotational angle recognition part 24. The rectangular work-piece is ground by grinding means 41 which rotates a grind wheel 46 in which grind stones 48 are annularly provided. The grinding means comprises a rotational speed adjustment part 63 which variably adjusts a rotational speed of the grind wheel during rotation. On the basis of the result recognized by the chuck table rotational angle recognition part, the rotational speed of the grind wheel is increased when an area of contact between the rectangular work-piece and the grind stone is wide, and the rotational speed of the grind wheel is decreased when an area of contact between the rectangular work-piece and the grind stone is narrow, by the rotational speed adjustment part.SELECTED DRAWING: Figure 1
申请公布号 JP2016150421(A) 申请公布日期 2016.08.22
申请号 JP20150030165 申请日期 2015.02.19
申请人 DISCO ABRASIVE SYST LTD 发明人 MIYAMOTO HIROKI;MORI TAKENOBU
分类号 B24B7/04;B24B41/06;H01L21/304 主分类号 B24B7/04
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