| 摘要 |
A placing member is configured to be supported from an outside by a terminal electrically connected to a terminal electrode, and an X-axis-direction extended portion, a Y-axis-direction extended portion, and a Z-axis-direction extended portion are provided in the terminal. This configuration provides an angular velocity sensor, in which a problem such that Y-axis-direction and Z-axis-direction vibrations applied from the outside cannot be damped is eliminated, and all the vibrations in three axis directions can be damped. |
| 主权项 |
1. An angular velocity sensor comprising:
a tuning-fork type vibrator in which a driving electrode, a detection electrode, and a support portion are provided; an IC that processes an output signal outputted from the detection electrode of the vibrator; a placing member that supports the support portion of the vibrator; and a case that accommodates the vibrator, the IC, and the placing member therein, a plurality of terminal electrodes being provided in a step portion of the case, a supply electrode, a GND electrode, and an output electrode being provided in an outer bottom surface of the case, a wiring pattern that electrically connects the plurality of terminal electrodes and the supply electrode, the GND electrode, and the output electrode being provided in the case, respectively, wherein the placing member is configured to be supported from an outside by a plurality of terminals electrically connected to the plurality of terminal electrodes, respectively, an X-axis-direction extended portion, a Y-axis-direction extended portion, and a Z-axis-direction extended portion are provided in each of the plurality of terminals, and the X-axis-direction extended portions of the plurality of terminals are alternately extended in directions opposite to each other, whereby barycenters of the plurality of terminals are substantially matched with a barycenter of the placing member. |
