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发明名称
摘要
申请公布号
DE2120388(A1)
申请公布日期
1971.12.16
申请号
DE19712120388
申请日期
1971.04.26
申请人
AGENCY IND SCIENCE TECHN
发明人
分类号
H01L21/306;H01L27/00;H01L29/00;H01L29/04;(IPC1-7):H01L3/12
主分类号
H01L21/306
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