| 摘要 |
<p>The outer electrodes fully enclose the sputtering zone and within the cylindrical body of the cathode proper a number of supplementary sheet metal plates, in the form of truncated conical surfaces are arranged so that the normals to their surfaces fall on the substrate to be coated and which viewed from that substrate are at least partially overlapped. Significantly higher rate of deposition with improved uniformity.</p> |
