NOX SENSOR

摘要

A stable sensor designed to detect accurately the total NOx concentration under 100 ppm in terms of the NO gas concentration is made up of a first cell and a second cell with a gas diffusion aperture provided between the two cells. The first cell has a partition wall of a substrate of oxygen ion conductor containing zirconia as the main component and permitting a gas to be detected to enter the zirconia substrate; oxygen pumping electrodes are also formed on the first cell substrate which functions to expel oxygen in an atmosphere of the first cell to the outside and to reduce NO2 of the NOx gas to be detected to NO gas. While NO gas entering through a gas diffusion aperture between the two cells flows into the second cell, a measurement is made of an electromotive force between a NO detection electrode formed in the second cell and a counter electrode also formed therein or a counter electrode formed on the reverse side of the zirconia substrate, since such electromotive force corresponds to the level of the NO gas concentration and thus provides the total NOx concentration.