| 摘要 |
<p>PROBLEM TO BE SOLVED: To enhance the accuracy of the housing position or the attaching position of a pellicle and to prevent a foreign matter from being generated even when the pellicle is interposed by a handling jig by setting the position of the end of a protection sheet at the outside circumferential surface of a frame. SOLUTION: A pellicle film 1 is made to adhere to one end surface of the frame 2 by using and adhesive agent 5 and the other end surface is provided with an adhesive agent layer 6. Then, the layer 6 is covered with the protection sheet 7. The sheet 7 does not project to the outside of two faced outside circumferential surfaces 11 out of four surfaces 11 of the frame 4 with which the arm of the handling jig used when the pellicle is moved is brought into contact. Then, the end of the sheet 7 is positioned more inside than the outside circumferential surfaces 11. Since one part of the sheet 7 projects to the outside of one outside circumferential surface out of two rest outside circumferential surfaces, the sheet 7 is peeled by seizing the projecting part thereof when the pellicle is attached to an exposure original plate. The sheet 7 does not project to the outside of one rest outside circumferential surface but it is good that it is made to project.</p> |
