摘要 |
<p>PROBLEM TO BE SOLVED: To expand the available range up to the high frequency band by using a Pb-contained Perovskite type ferroelectric single crystal film the c-axis of which is oriented in a direction perpendicular to the film surface for a piezoelectric material for making a piezoelectric vibrator component having a pair of electrodes opposed with this material inbetween. SOLUTION: A ferroelectric single crystal film 1 of a Pb-containing Perovskite type compd. is grown on a single crystal seed substrate 2 by dipping the substrate in a supersaturated melt of Pb-containing material. The substrate well matches the lattice const. of the film at an epitaxial growth temp., has a thermal expansion curve similar to that of the film and is little damaged by a soln. of this material. The compd. is shown by the formula (0<=a<x, x/y=0.8-1.1), and the spontaneous polarization (c-direction) is oriented perpendicular to the substrate surface. The film l is spontaneously polarized in c-axis, superior in dielectric property and formed from a melt below Curie point. Its baked product is usable in up to the high frequency band.</p> |