发明名称 PIEZOELECTRIC VIBRATOR COMPONENT AND MANUFACTURE THEREOF
摘要 <p>PROBLEM TO BE SOLVED: To expand the available range up to the high frequency band by using a Pb-contained Perovskite type ferroelectric single crystal film the c-axis of which is oriented in a direction perpendicular to the film surface for a piezoelectric material for making a piezoelectric vibrator component having a pair of electrodes opposed with this material inbetween. SOLUTION: A ferroelectric single crystal film 1 of a Pb-containing Perovskite type compd. is grown on a single crystal seed substrate 2 by dipping the substrate in a supersaturated melt of Pb-containing material. The substrate well matches the lattice const. of the film at an epitaxial growth temp., has a thermal expansion curve similar to that of the film and is little damaged by a soln. of this material. The compd. is shown by the formula (0<=a<x, x/y=0.8-1.1), and the spontaneous polarization (c-direction) is oriented perpendicular to the substrate surface. The film l is spontaneously polarized in c-axis, superior in dielectric property and formed from a melt below Curie point. Its baked product is usable in up to the high frequency band.</p>
申请公布号 JPH09321361(A) 申请公布日期 1997.12.12
申请号 JP19960130447 申请日期 1996.05.27
申请人 TDK CORP 发明人 KATO IKUO;MORIKOSHI HIROKI
分类号 C30B19/00;C30B29/32;H01L41/09;H01L41/187;H01L41/22;H03H3/02;H03H9/17;(IPC1-7):H01L41/09 主分类号 C30B19/00
代理机构 代理人
主权项
地址