发明名称 Control of plasma-emitting spots on sacrificial cathode
摘要 The process, for use in coating by vacuum deposition of metal, consists of (a) generating a plasma from one face of a sacrificial cathode of the material to be deposited, at one or more spots on the cathode, in an electric arc deposition chamber; and (b) creating a magnetic field close to the cathode face to extract the lines of force in a position inclined to the surface, and move the spot circularly over the plasma-emitting face.
申请公布号 ES8708022(A3) 申请公布日期 1987.11.16
申请号 ES19180005550 申请日期 1986.05.16
申请人 MULTI-ARC VACUUM SYSTEMS INC. 发明人
分类号 C23C14/50;C25D17/10;(IPC1-7):C23C14/50 主分类号 C23C14/50
代理机构 代理人
主权项
地址