| 摘要 |
PURPOSE:To facilitate obtaining flat electric circuits by a method wherein a plurality of super-lattice layers of oxide superconductor and super-lattice layers of insulator or semiconductor are alternately laminated and the parts of the super-lattice layers which do not constitute electric circuits are subjected to a heat treatment so as to disorder the super-lattice structures of those parts. CONSTITUTION:Oxide superconductor crystals are made to grow on the surface of a substrate 1 to form super-lattice layers 2 and insulator crystals are made to grow on the surfaces of the super-lattice layers 2 to form super-lattice layers 3. If the parts of the super-lattice layers 2 and 3 which do not constitute electric circuits are subjected to a heat treatment, atoms constituting the superconductor of the super-lattice layers 2 and atoms constituting the insulator of the super- lattice layers 3 are diffused and mixed with each other and the super-lattice structures of those parts are disordered. Therefore, the parts subjected to the heat treatment are converted into metal oxide insulators 4. The parts which are not subjected to the heat treatment show excellent superconducting properties by the existence of the super-lattice layers 2 and constitute electric circuits 5. The surface of such electric circuits 5 coincide with the surfaces of the insulators and do not protrudes like the surfaces formed by deposition.
|
