DEPOSITION OF THIN FILM WITH SUPPORT AND PRODUCTION OF X-RAY MASK

摘要

PROBLEM TO BE SOLVED: To deposit a thin film secured to a support and to produce an X-ray mask while protecting them against mechanical damage and eliminating contamination due to acid or alkali. SOLUTION: A substance making a transition to a liquid phase or a solid phase at a temperature lower than the denaturation point of a thin film substance is employed as a basic material 12. A thin film 13 is then deposited thereon to form a laminate 14 which is then brought into tight contact with a support 11 composed of a substance in which phase transition does not take place at a temperature lower than the transition temperature of the basic material 12. Subsequently, it is heat treated at a temperature higher than the transition temperature of the basic material 12 but lower than the denaturation point of the thin film substance to produce a thin film 10 with support. An X-ray absorber is then bonded onto the thin film 10 with support and sputtered to produce an X-ray mask.