| 摘要 |
PURPOSE:To make it possible to accurately and visibly measure the distribution of phosphoric acid without causing evaporation of phosphoric acid by freezing an electrode sample in liquid nitrogen where solid nitrogen acid coexists and irradiating an electron beam probe to the sample while it is being cooled. CONSTITUTION:When a container 27 of liquid nitrogen 26 is placed in a vacuum chamber 29 and the pressure in the chamber 29 is reduced, a part of nitrogen becomes solid nitrogen 32. Next, the container is taken out of the chamber 29, and the sample mount 18B fixing an electrode sample 19B is dipped in the liquid nitrogen 26 is quickly freeze the sample 19B. Then, the sample 19B is fractured to get a frozen fractured sample 40. This sample 40 is put on a cooling stage 35 jointed to a liquid nitrogen trap 36 to irradiate an electron probe 21 on the sample 40. Then, a secondary electron beam 22 and a characteristic X-ray which are generated are detected. Thereby, it is possible to accurately and visibly measure a phosphoric acid distribution of a sample without causing evaporation of phosphoric acid. |
