| 摘要 |
PURPOSE:To easily manufacture a frontal substrate on which the position of a transparent electrode coincides with that of a black dielectric by using the black dielectric itself as a mask after it is formed, and by patterning the transparent electrode. CONSTITUTION:A material for black dielectric is printed on a frontal glass substrate 1 by screen-printing. It is then baked at a predetermined temperature so as to form a black dielectric layer 4, after which the frontal glass substrate 1 on which the black dielectric layer 4 is formed is transferred into an electric furnace, and is heated and moved to an evaporation chamber, while ternary chloride antimony is added to binary di-methyl tin and is heated and vaporized, and by transferring the vapor generated in the process into the evaporation chamber, along with heated air, a transparent conductive film 2 is obtained. On the transparent conductive film 2, a photo resist is applied, and is exposed with the black dielectric layer 4 formed prior thereto as a mask, and the transparent conductive film 2 on the black dielectric layer 4 is etched off, so as to form a transparent electrode 3 which is perfectly overlapped with the black dielectric layer 4. |
