COATER,申请号JP19900229813-传众专利搜索

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发明名称	COATER
摘要
申请公布号	JPH04110061(A)	申请公布日期	1992.04.10
申请号	JP19900229813	申请日期	1990.08.31
申请人	TOKYO ELECTRON LTD;TOUKIYOU EREKUTORON KIYUUSHIYUU KK	发明人	TAGAMI KOICHI;KIMURA YOSHIO
分类号	G03F7/16;B05C11/08;G03F7/20;H01L21/027;H01L21/30	主分类号	G03F7/16
代理机构		代理人
主权项
地址

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