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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH04159768(A)
申请公布日期
1992.06.02
申请号
JP19900284929
申请日期
1990.10.23
申请人
NEC YAMAGATA LTD
发明人
IGARASHI TOMOHIRO;TAKASHINA REIJI
分类号
H01L27/04;H01L21/822;H01L29/93
主分类号
H01L27/04
代理机构
代理人
主权项
地址
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