DUMMY WAFER MADE OF VITREOUS CARBON FOR HEAT TREATING SEMICONDUCTOR

摘要

PROBLEM TO BE SOLVED: To provide a dummy water being mounted on a wafer boat in the heat treatment process of semiconductor in which the dummy wafer can be used for a long term by protecting the dummy wafer against abnormal thermal deformation so that it can be reused a large number of times thereby eliminating a troublesome replacing operation. SOLUTION: The circular dummy wafer made of vitreous carbon and mounted on a wafer boat being placed in a heat treatment furnace for semiconductor has curved surface of a specified radius of curvature. Preferably, a relationship h/d=0.1×10<-2> ∼0.5×10<-2> is set between the radius (d) of a circular plane defined by the circumferential end part of the dummy wafer and the length (h) of a perpendicular from the center of the dummy water.