LIQUID CRYSTAL DISPLAY DEVICE AND ITS PRODUCTION

摘要

PURPOSE:To increase the mobility of driving circuits TFTs by suppressing the off current of display picture elements TFTs at the time of polycrystallizing the semiconductor silicon layer of the thin-film transistors (TFTs) constituting the liquid crystal display device. CONSTITUTION:The parts 5, 6 forming the driving circuit of the amorphous silicon layer deposited on an insulating substrate 1 are irradiated with a laser beam at high energy of 160 to 280mJ/cm<2> and the parts 4 forming display picture elements at 100 to 150mJ/cm<2>. The crystallinity better than the crystallinity of the display picture elements TFTs is thereby obtd. with the semiconductor layers constituting the driving circuit TFTs. As a result, the driving circuits TFTs satisfy the high mobility characteristic and the display picture elements TFTs satisfy the low off current characteristic even if the display picture elements and the driving circuits are formed within the same substrate.