发明名称 FIELD EMISSION STRUCTURE MANUFACTURED ON MACROPARTICLE POLYSILICON SUBSTRATE
摘要 <p>PURPOSE: To obtain an electron emitting array useful to the other device including a display and an integrated circuit. CONSTITUTION: An array includes a relatively thick semiconductive base board 11 which is a macro-particle base board 11, and the base board is reformed by amorphousness and recrystallization by ion injection, or is passivated by hydrogenation, to be covered by a particle boundary 1. After that, redundancy circuit parts 2 and 4 are manufactured on the base board to more increase a product yield.</p>
申请公布号 JPH0660795(A) 申请公布日期 1994.03.04
申请号 JP19930134193 申请日期 1993.05.13
申请人 MICRON TECHNOL INC 发明人 DEIBITSUDO EE KIYASHII;JIEI BURETSUTO RORUFUSON;TAIRAA EE ROOREI;TOURANGU TEII DOON
分类号 H01J1/30;H01J1/304;H01J9/02;H01J29/04;H01J31/12;(IPC1-7):H01J1/30 主分类号 H01J1/30
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