摘要 |
<p>PURPOSE: To obtain an electron emitting array useful to the other device including a display and an integrated circuit. CONSTITUTION: An array includes a relatively thick semiconductive base board 11 which is a macro-particle base board 11, and the base board is reformed by amorphousness and recrystallization by ion injection, or is passivated by hydrogenation, to be covered by a particle boundary 1. After that, redundancy circuit parts 2 and 4 are manufactured on the base board to more increase a product yield.</p> |