DELIVERING EQUIPMENT

摘要

PURPOSE:To provide a delivering equipment wherein equipment constitution can be simplified, and equipment cost can be reduced by decreasing the number of components. CONSTITUTION:A cassette mounting part 11 of a wafer loader is constituted to be movable in the horizontal direction. By moving the cassette mounting part 11 in the state that a water sensor 15 is made to protrude from the aperture 14, it is detected whether a semiconductor wafer 12 is accommodated in each slot of the wafer cassette 13.