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发明名称
MEASURING DEVICE AND OPERATING METHOD THEREOF
摘要
申请公布号
JPH0798324(A)
申请公布日期
1995.04.11
申请号
JP19930261779
申请日期
1993.09.24
申请人
SEMICONDUCTOR ENERGY LAB CO LTD
发明人
INUSHIMA TAKASHI;RIMANTASU BAITOKUSU;HIROKI MASAAKI;SATO EIJI;TERAMOTO SATOSHI
分类号
G01F1/00;G01P5/12;G01P13/00;(IPC1-7):G01P5/12
主分类号
G01F1/00
代理机构
代理人
主权项
地址
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