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发明名称
POSITIVE PHOTORESIST
摘要
申请公布号
RU2100835(C1)
申请公布日期
1997.12.27
申请号
RU19940045238
申请日期
1994.12.26
申请人
INSTITUT ELEKTROKHIMII IM.A.N.FRUMKINA RAN
发明人
VANNIKOV ANATOLIJ V;GRISHINA ANTONINA D;KOLTSOV YURIJ I;KUDRYAVTSEV EVGENIJ N;TEDORADZE MARINA G;KHAZOVA GALINA O
分类号
G03F7/039;G03C1/56;(IPC1-7):G03F7/039
主分类号
G03F7/039
代理机构
代理人
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