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发明名称
METHOD AND APPARATUS FOR DETECTING LEAKAGE
摘要
申请公布号
JPH1090105(A)
申请公布日期
1998.04.10
申请号
JP19960241716
申请日期
1996.09.12
申请人
ULVAC JAPAN LTD
发明人
OCHIAI EIJIRO
分类号
G01M3/20;(IPC1-7):G01M3/20
主分类号
G01M3/20
代理机构
代理人
主权项
地址
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