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发明名称
FORMATION METHOD OF INSULATING FILM FOR ELEMENT ISOLATION
摘要
申请公布号
KR0158943(B1)
申请公布日期
1999.02.01
申请号
KR19940030641
申请日期
1994.11.21
申请人
HYUNDAI ELECTRONICS IND. CO.,LTD
发明人
KIM, JIN-TAE;OH, TAE-WON;CHOE, JANG-SUB
分类号
H01L21/76;(IPC1-7):H01L21/76
主分类号
H01L21/76
代理机构
代理人
主权项
地址
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