| 摘要 |
<p>PROBLEM TO BE SOLVED: To enable the smooth rotation and ensured fixing of a holder by providing at least one vacuum chucking part having a smaller mounting action for fixing the holder on a table than that of a guide member. SOLUTION: A vacuum chucking part 42 for vacuum-chucking a holder 21 is coupled with a table 211 at a position distant from guide members 22a-22c to a center axis 24 through a thin leaf spring 42. A vacuum pressure feeder feeds a vacuum pressure to the vacuum chucking part 42 through a bellows piping 43 to vacuum chuck the holder 21 at the top face of the vacuum chucking part 42 by the suction of the vacuum pressure. The holder 21 is mounted on the table 211, the thin leaf spring 41 makes a micro-elastic deformation due to the wt. of the holder and the top face of the vacuum chucking part 42 lowers by a micro-amt. to be stable.</p> |
