METHOD FOR INSPECTING DEFECT IN FORMATION OF SPACER FOR LIQUID CRYSTAL CELL

摘要

PROBLEM TO BE SOLVED: To provide a method for inspecting defects in formation of a spacer for liquid crystal cell, wherein the decision of the defects can be automatically and accurately performed and the decision of the defects of the shape can be promptly and accurately performed about the spacer for the liquid crystal cell formed on the surface of a substrate. SOLUTION: The method for inspecting defects in forming the spacer for liquid crystal cell is characterized in that an optionally selected region of the substrate having columnar spacers formed on the surface thereon by a photolithographic method is picked up (step S3) by an image pickup means from an upper part of the side on which the columnar spacers are formed of the substrate and a confirmation whether there is any columnar spacer in the region based on an image data obtained by the image pickup means is performed (step S4) by using an image processing means to decide the existence of a spacer lack.