PRESSURE SENSOR

摘要

PROBLEM TO BE SOLVED: To make surely manufacturable a pressure sensor without time and labor. SOLUTION: This pressure sensor has a silicon substrate 1 with a sheet- shaped diaphragm formed by partly thinning the substrate and a joining member 2 joined to the substrate 1 to be opposite to the diaphragm 1c. The pressure sensor detects a pressure change from the quantity of deflection of the diaphragm 1c when receiving a pressure from the opposite side face 1f of a face 1a opposite to the joining member 2. The diaphragm 1c can butt against the joining member 2 by deflecting when an excessive pressure is transmitted thereto. The joining member 2 has a communication hole 2a formed penetrating from the outside. The communication hole 2a communicates with an opposite space 1g to the diaphragm 1c. Moreover, one of the diaphragm 1c and the joining member 2 is provided with a projection 1h of a separate body which can butt against the other when the diaphragm 1c deflects. The projection 1h is formed of a metal and has an elasticity.