发明名称 Vessel for pretreatment of elementary analysis, method for analysing elements, inductively coupled plasme torch and apparatus for elementary analysis
摘要 <p>There is disclosed a vessel for pretreatment of elementary analysis wherein the vessel is a ceramic vessel produced by chemical vapor deposition (CVD) method. And there is disclosed an inductively coupled plasma torch that has at least an induction coil and a nozzle and is used in an apparatus for elementary analysis by ICP method, wherein the nozzle is a ceramic nozzle produced by CVD method. Thus, there can be provided a vessel for pretreatment of elementary analysis that excels in heat resistance and chemical resistance such as acid resistance, and has high purity. There can be also provided an inductively coupled plasma torch used in an apparatus for analysis by ICP method that enables accurate elementary analysis and excels in durability, and an apparatus for elementary analysis by ICP method having this.</p>
申请公布号 EP1509067(A2) 申请公布日期 2005.02.23
申请号 EP20040254949 申请日期 2004.08.18
申请人 SHIN-ETSU CHEMICAL CO., LTD. 发明人 KIMURA, NOBORU;KUNIYA, JOJI;ARAI, MASATAKA
分类号 G01N21/73;B01L3/00;B01L3/04;C23C16/34;C23C16/38;C23C16/42;G01N1/10;G01N1/28;G01N1/38;G01N21/31;H01J49/10;H05H1/30;(IPC1-7):H05H1/30;G01N1/00 主分类号 G01N21/73
代理机构 代理人
主权项
地址