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发明名称
DIPOLE POLARIZING APERTURE IN EXPOSURE APPARATUS
摘要
申请公布号
KR20070044928(A)
申请公布日期
2007.05.02
申请号
KR20050101254
申请日期
2005.10.26
申请人
HYNIX SEMICONDUCTOR INC.
发明人
YANG, HYUN JO
分类号
H01L21/027
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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