| 摘要 |
An apparatus for manufacturing carbon nanotubes is provided. The apparatus includes a reaction chamber, a substrate supporter, a guiding means, a first electrode, a second electrode, and a power supply. The reaction chamber has an inlet and an outlet. The reaction chamber receives the substrate supporter, the guiding means, the first electrode, and the second electrode. The substrate supporter intercepts across a gas flow of the carbon-containing gas and substantially perpendicular with a path of the gas flow. The first electrode and the second electrode are disposed opposite to each other for creating an electrical field in the reaction chamber. A part of the electrical field perpendicularly penetrates the substrate supporter to control the carbon nanotubes growing in an aligning manner according to a direction of the electrical field. The first electrode and the second electrode each has a plurality of through holes allowing the carbon-containing gas to flow therethrough.
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