摘要 |
PROBLEM TO BE SOLVED: To improve strength of a protective film while adhesion of a functional film to the protective film is made sufficient by a method wherein an inorganic film is formed on a base material, an inorganic protective film is formed on the film, and both films are simultaneously treated by heating thereafter. SOLUTION: For coating liquid forming a functional film, when the functional film is a dielectric film, an inorganic dielectric material such as low melting point glass, alumina, etc., is used. For the coating liquid, functional material particles, a binder, and a solvent are mixed to be made a paste state. As a protective film forming coating liquid, a material containing only an alkali earth metal (magnesium) satisfies the purpose, or that containing a composite particle wherein the functional material particle is coated with an alkali earth metal compound particle also satisfies the purpose. The pasty coating liquid is screen process printed on a base material (electrode), and dried to form a dielectric film. After forming a polymer material layer on the film, the protective film forming coating liquid is coated, dried, and treated by heating at 400 to 600 deg.C to form a uniform film. |