Turbomolekularpumpe

摘要

A turbo-molecular pump includes a casing having an intake port (14a), a stator (S) fixedly mounted in the casing (14), and a rotor (R) supported in the casing (14) for rotation relatively to the stator. The stator and the rotor make up a turbine blade pumping section (L1) and a groove pumping section (L2) for evacuating gas. A scattering prevention member (50) is provided for preventing fragments of the rotor (R) from being scattered through the intake port (14a).