| 摘要 |
A leak detector includes a leak detector inlet to receive a test gas; a vacuum pump coupled to the leak detector inlet; a test gas sensing unit connected through a passage to the leak detector inlet; and a membrane that is permeable to the test gas disposed in the passage between the leak detector inlet and the test gas sensing unit, the membrane having a permeance to the test gas that varies by less than five percent over a temperature range of T0-20K to T0+20K, where T0 is a design temperature. In addition, methods are provided for making a composite membrane that includes a semi-permeable membrane and a porous membrane. Furthermore, a reference leak, which includes a composite membrane is provided.
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