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发明名称
Verfahren zur Abscheidung von Schichten auf einem Substrat
摘要
Die Erfindung betrifft ein Verfahren zur Abscheidung von Schichten auf einem Substrat (1).
申请公布号
DE102008033938(A1)
申请公布日期
2010.01.28
申请号
DE200810033938
申请日期
2008.07.18
申请人
INNOVENT E.V.
发明人
PFUCH, ANDREAS;SCHUBERT, TIM;SCHIMANSKI, ARND;GRUENLER, BERND
分类号
C23C16/453;C23C16/04
主分类号
C23C16/453
代理机构
代理人
主权项
地址
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