| 摘要 |
PROBLEM TO BE SOLVED: To provide a measuring device capable of accurately measuring a dry state of a resin film with high sensitivity.SOLUTION: In the gas measuring device including a cylindrical member 10 of a rotation drive type, in which the resin film F transported in roll-to-roll in a vacuum chamber is heated while rolling it partially in an outer peripheral surface, the cylindrical member 10 has a cycling path 13 in which a heat medium is cycling in its inner peripheral face, and a plurality of gas flow paths 14 extending in a center axis O direction of the cylindrical member 10 in its outer peripheral thickness section are formed over all circumference with approximately uniform intervals. Each of the plurality of gas flow paths 14 has a plurality of open holes 15 that open in the outer peripheral side along the center axis O with approximately uniform intervals, and they are connected to a pressure measuring means 30 through an opening/closing means represented by a gas rotary joint 20 which opens/closes according to an angle position by rotation of the cylindrical member 10.SELECTED DRAWING: Figure 2 |
