| 发明名称 |
BISAMINOALKOXYSILANE COMPOUNDS AND METHODS FOR USING SAME TO DEPOSIT SILICON-CONTAINING FILMS |
| 摘要 |
Disclosed is bisaminoalkoxysilane which is thermally stable and is represented by chemical formula 1, R^1Si(NR^2R^3)(NR^4R^5)OR^6. Also, disclosed is an application method thereof. |
| 申请公布号 |
KR20160100260(A) |
申请公布日期 |
2016.08.23 |
| 申请号 |
KR20160016581 |
申请日期 |
2016.02.12 |
| 申请人 |
AIR PRODUCTS AND CHEMICALS, INC. |
发明人 |
SPENCE DANIEL P.;LEI XINJIAN;PEARLSTEIN RONALD MARTIN;XIAO MANCHAO;LI JIANHENG |
| 分类号 |
C07F7/10;H01L21/02;H01L21/205 |
主分类号 |
C07F7/10 |
| 代理机构 |
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