MOLD, IMPRINT APPARATUS, AND METHOD OF MANUFACTURING ARTICLE

摘要

A mold comprises a pattern part in which patterns are formed, and a concave part. The concave part is formed on a back side of the pattern part, and has a size including the pattern part from a planar direction. An edge of the pattern part approximately has a shape of a rectangle. The concave part approximately has a shape of a rectangle having four round corners from a planar direction. The shortest distance from each point on a side of the edge of the pattern part to the edge of the concave part is constant. The mold has advantages of reducing defects in patterns and enhancing productivity.