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经营范围
发明名称
Verfahren zum Herstellen einer Photomaske
摘要
申请公布号
DE1772757(A1)
申请公布日期
1971.06.03
申请号
DE19681772757
申请日期
1968.06.29
申请人
TELEFUNKEN PATENTVERWERTUNGSGESELLSCHAFT MBH
发明人
MEYER,HANS
分类号
G03F1/54
主分类号
G03F1/54
代理机构
代理人
主权项
地址
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