发明名称 CONDENSEUR OEIL DE MOUCHE A JUXTAPOSITION DE SPHERES TRANSPARENTES POUR MICROPHOTOLITHOGRAPHIE
摘要 <p>The condenser has an arrangement of synthetic transparent sapphire spheres, side by side and held between parallel sided strips. There are two layers of spheres (13,14), packed closely and regularly and held by parallel strips (11,12). The base layer (13) is arranged so that the sphere centres are at the centre of a triangular network. This is held by a frame (15), tangential to the spheres and circular. The relation of the base sphere diameter to that of those above is between the square root of 3 and 3 and the upper spheres are also centered on the network meshes.</p>
申请公布号 FR2526962(A1) 申请公布日期 1983.11.18
申请号 FR19820008359 申请日期 1982.05.13
申请人 DME 发明人 MICHEL LETELLIER
分类号 G02B19/00;G03F7/20;(IPC1-7):02B19/00 主分类号 G02B19/00
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