ETCHING METHOD,申请号JP19820088098-传众专利搜索

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发明名称	ETCHING METHOD
摘要
申请公布号	JPS58207373(A)	申请公布日期	1983.12.02
申请号	JP19820088098	申请日期	1982.05.26
申请人	TOKYO SHIBAURA DENKI KK	发明人	KANTOU MASAHARU;OOTAKE YASUHISA
分类号	C23F1/00;C23F1/02;C23F1/08;H01J9/14	主分类号	C23F1/00
代理机构		代理人
主权项
地址

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