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发明名称
摘要
申请公布号
JPS6224953(B2)
申请公布日期
1987.05.30
申请号
JP19770010460
申请日期
1977.02.02
申请人
HANDOTAI KENKYU SHINKOKAI
发明人
NISHIZAWA JUNICHI
分类号
H01L29/80;H01L21/822;H01L21/8222;H01L27/04;H01L27/06;H01L29/06
主分类号
H01L29/80
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代理人
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