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发明名称
EXHAUST METHOD
摘要
申请公布号
JPH057764(A)
申请公布日期
1993.01.19
申请号
JP19910183657
申请日期
1991.06.28
申请人
TOKYO ELECTRON LTD
发明人
WAKABAYASHI TAKESHI;MATSUO TAKENOBU;MORIYA SHUJI
分类号
B01J4/00;C23F4/00;H01L21/205;H01L21/22
主分类号
B01J4/00
代理机构
代理人
主权项
地址
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