Rotary anode for X-ray tube and method for manufacturing the same
摘要
<p>A long-life, inexpensive rotary anode for use in an X-ray tube having an X-ray generating layer formed by CVD on a graphite substrate and capable of producing high-power X-rays without the possibility of thermal cracks or delamination. When forming the X-ray generating layer of a tungsten-rhenium alloy on the graphite substrate through a rhenium intermediate layer by CVD, material gases are supplied intermittently so that the entire part or only the surface area of the X-ray generating layer will be formed of laminated structure of ultra-thin films each 0.1 - 5.0 microns thick. The content of rhenium in the tungsten-rhenium alloy forming the X-ray generating layer has a gradient form, i.e. increases from the interface with the rhenium intermediate layer toward the surface, so that the total amount of rhenium added can be reduced. <IMAGE></p>
申请公布号
EP0578109(B1)
申请公布日期
1995.12.20
申请号
EP19930110366
申请日期
1993.06.29
申请人
TOKYO TUNGSTEN CO., LTD.;SUMITOMO ELECTRIC INDUSTRIES, LIMITED