| 摘要 |
PURPOSE: To provide an ultrasonic actuator which can be moved one- dimensionally or two-dimensionally in a plane and is easy to incorporate in a cylindrical part. CONSTITUTION: An ultrasonic actuator 10 has an annular elastic element 11 and piezoelectric devices 12 and 13 which are bonded to the plane of the annular elastic element 11 at positions facing each other. If driving signals are inputted to the piezoelectric devices 12 and 13, the elastic element 11 is excited and the non-axis-symmetry vibration and the bending vibration are generated and the elastic element 11 is made to run automatically in ±x directions by its contraction. |
