METHOD OF PROJECTION EXPOSURE AND PRODUCTION METHOD OF DEVICE USING IT,申请号JP19960092067-传众专利搜索

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发明名称	METHOD OF PROJECTION EXPOSURE AND PRODUCTION METHOD OF DEVICE USING IT
摘要
申请公布号	JPH09260269(A)	申请公布日期	1997.10.03
申请号	JP19960092067	申请日期	1996.03.19
申请人	CANON INC	发明人	KONO MICHIO
分类号	G03F7/20;G03F9/00;G03F9/02;H01L21/027;(IPC1-7):H01L21/027	主分类号	G03F7/20
代理机构		代理人
主权项
地址

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