| 摘要 |
<p>Apparatus comprising: an evacuable chamber (26); a rotatable drum (14) adapted to roll a web (18), wherein when the web (18) is rolled over the drum (14), the web (18) divides the evacuable chamber into a deposition zone (24) and a winding zone (22); the deposition zone (24) facing the side of the web (18) onto which a layer is to be deposited, the winding zone (22) facing the other side of the web (18); and means (30,12,60) for forming a plasma in the winding zone, the plasma adapted to allow for the dissipation of static electricity from the web (18) so that the sticking of the web (18) to the drum (14) is reduced. <IMAGE></p> |
