| 摘要 |
PROBLEM TO BE SOLVED: To provide a scanning proximity field optical microscope capable of measuring a sample for its three-dimensional data by one scanning. SOLUTION: In this scanning proximity field optical microscope, a probe 2 is arranged in the vicinity of the surface of a sample 1, and the vicinity of surface of the sample 1 is measured with light as the probe 2 is scanning the surface of the sample 1. Especially by being provided with a scanner 3 for a probe for vibrating the probe 2 approximately vertically with respect to the surface of the sample 1 when scanning, a photodetector 8 for probe-location detection for detecting the distance between the surface of the sample 1 and the probe 2, and a data retaining mechanism 12 for retaining signals detected by approximately vertical scanning with respect to the surface of the sample 1 as more than two measurement data rows formed according to a sampling table, it is possible to obtain the threedimensional data on the surface of the sample 1. |
